JPH0378693B2 - - Google Patents
Info
- Publication number
- JPH0378693B2 JPH0378693B2 JP24511286A JP24511286A JPH0378693B2 JP H0378693 B2 JPH0378693 B2 JP H0378693B2 JP 24511286 A JP24511286 A JP 24511286A JP 24511286 A JP24511286 A JP 24511286A JP H0378693 B2 JPH0378693 B2 JP H0378693B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- less
- glass
- polishing
- coating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 100
- 238000000576 coating method Methods 0.000 claims description 50
- 239000011521 glass Substances 0.000 claims description 50
- 239000011248 coating agent Substances 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 22
- 239000000919 ceramic Substances 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000010408 film Substances 0.000 description 46
- 238000005498 polishing Methods 0.000 description 30
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 24
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 20
- 230000003746 surface roughness Effects 0.000 description 18
- 239000000463 material Substances 0.000 description 17
- 229910010293 ceramic material Inorganic materials 0.000 description 13
- 229910000838 Al alloy Inorganic materials 0.000 description 12
- 229910004298 SiO 2 Inorganic materials 0.000 description 11
- 230000007547 defect Effects 0.000 description 10
- 239000010409 thin film Substances 0.000 description 10
- 238000004544 sputter deposition Methods 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 239000011148 porous material Substances 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 239000000956 alloy Substances 0.000 description 5
- 230000007797 corrosion Effects 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 5
- 238000001513 hot isostatic pressing Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000005385 borate glass Substances 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000005368 silicate glass Substances 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 229910020617 PbO—B2O3—SiO2 Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000003258 bubble free glass Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000748 compression moulding Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012153 distilled water Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000003966 growth inhibitor Substances 0.000 description 1
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- ZPPSOOVFTBGHBI-UHFFFAOYSA-N lead(2+);oxido(oxo)borane Chemical compound [Pb+2].[O-]B=O.[O-]B=O ZPPSOOVFTBGHBI-UHFFFAOYSA-N 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24511286A JPS6398836A (ja) | 1986-10-15 | 1986-10-15 | 磁気デイスク用基板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24511286A JPS6398836A (ja) | 1986-10-15 | 1986-10-15 | 磁気デイスク用基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6398836A JPS6398836A (ja) | 1988-04-30 |
| JPH0378693B2 true JPH0378693B2 (en]) | 1991-12-16 |
Family
ID=17128800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24511286A Granted JPS6398836A (ja) | 1986-10-15 | 1986-10-15 | 磁気デイスク用基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6398836A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5181198B2 (ja) * | 2006-03-28 | 2013-04-10 | 独立行政法人産業技術総合研究所 | セラミックス焼結体及びその製造方法 |
| DE102019134704A1 (de) | 2019-12-17 | 2021-06-17 | Grammer Aktiengesellschaft | Fahrzeugsitz |
-
1986
- 1986-10-15 JP JP24511286A patent/JPS6398836A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6398836A (ja) | 1988-04-30 |
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